低频/中频
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Crystal®

Advanced Energy (AE) 的 Crystal® 电源非常适用于大面积玻璃镀膜应用，如建筑玻璃、汽车玻璃、减反射镀膜和高反射镜等。更低的故障率，回报您更高的产量。这些电源的可用功率为 180kW,120KW,60KW。为双靶磁控溅射应用提供了更宽祖抗匹配的低频率正弦工艺电源。AE 的 Crystal 电源是唯一特别为等离子环境而设计拓扑结构的交流电大功率电源。


优势 特点
  • 更灵活
  • 产量更高
  • 减少当机时间
  • 吞吐量提高
  • 宽阻抗匹配低频率正弦工艺电源
  • 大功率电源——最大180kW 功率
  • 专为等离子环境而设计

 

可下载文献：

Crystal® 60、120及180 kW交流电源     English
玻璃镀膜电源      English
Understanding and Optimizing Static Deposition Processes for TFT Manufacturing (2008) white paper
Power Supply Topologies (2004) white paper
Performance Considerations of High-Power AC Plasma Deposition Power Supplies (2004) white paper
Design Aspects of Large-Area Coating Supplies (2004) white paper
Signal Integrity for Vacuum Processing Systems (2003) white paper
The Evolution of Power Delivery in Reactive Silicon Sputtering (1999) white paper
Effects of the Anode Configuration on Substrate Heating in Dual-Magnetron Sputtering (1999) white paper
Enhanced Reactively Sputtered Al2O3 Deposition by Addition of Activated Reactive Oxygen (1999) white paper
Closed-Loop-Controlled, Reactive, Dual-Magnetron Sputtering (1999) white paper
Introducing Power Supplies and Plasma Systems (2001) white paper
Fabs can ride through voltage sags with power-quality targets, July 2004 magazine reprint
Power Supplies Advance Beyond Volts and Amps, June 2003 magazine reprint
A New Generation of Power Supplies for Large Area Dual Magnetron Sputtering, April 2002 magazine reprint
AE Global Services brochure

 

更多信息

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