For more information, contact:

Jim Donaldson Advanced Energy Industries, Inc. 970.407.6374

Marna Shillman Advanced Energy Industries, Inc. 970.407.6280 marna.shillman@aei.com

End-Point Detection System for CVD Clean now available from Advanced Energy

June 21, 1999—The RFEP product line which optimizes CVD clean processes with superior end-point detection is now available from Advanced Energy Industries, Inc. (Nasdaq: AEIS). Using in-situ RF sensors, the RFEP system eliminates problems inherent with optical measurement systems.

 

Benefits

• Shortens clean cycles:
• Increases system up-time
• Reduces gas consumption
• Reduces greenhouse gas emissions
• Higher throughput
• Longer run times between wet cleans
• Fast response to surface conditions
• Longer life for tool consumables (e.g., chamber shower head and interior):
• Lower particulate contamination:
• Improves yields
• Immune to degraded viewport conditions
• No calibration required
• No filters to swap

Copies of the brochure describing this end-point detection system are available at no charge by sending a request via e-mail to sales.support@aei.com or from the web at advanced-energy.com.

Advanced Energy Industries, Inc. is a leading developer and manufacturer of power supplies and related products that are critical in the manufacturing of semiconductors, data storage devices, flat panel displays, and other industrial products using thin-film technology such as glass coatings, decorative coatings, and optical coatings. Founded in 1981, AE is a publicly held company traded on Nasdaq, symbol AEIS. Its web site address is advanced-energy.com.