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Advanced Energy Releases Substrate Heating in Dual Magnetron Sputtering White Paper

A large number of optical coating manufacturers have moved from glass to polycarbonate substrates in an effort to save cost. Many of these substrates experience damage from the increased heating load because of their low thermal capacitance and temperature susceptibility. This white paper discusses the investigation into the nature of increased heating loads and possible solutions to the problem. The paper concludes that measurements of the substrate heating load indicates that more than 50% of the increase witnessed between ac and dc processes can be accounted for by changes in the anode configuration alone.

Copies of this paper are available at no charge by sending a request via e-mail to sales.support@aei.com or from the web at advanced-energy.com.

Advanced Energy Industries, Inc. is a leading developer and manufacturer of power supplies and related products that are critical in the manufacturing of semiconductors, data storage devices, flat panel displays, and other products using thin-film technology. Founded in 1981, AE is a publicly held company. Its web site address is advanced-energy.com.