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AE® also showcasing Aera® EPV Exhaust Pressure Controller,
Litmas™ Remote Plasma Source Platform and Summit® Specialized DC Power System
FORT COLLINS, Colo., July 5, 2006—Advanced Energy Industries, Inc. (Nasdaq: AEIS) will introduce the new OR4000 product family of Sekidenko optical fiber thermometers (OFTs) and emissometers during SEMICON West 2006, the company announced today. AE will also feature its Aera EPV100-AW exhaust pressure controller, Litmas RPS 1501 and 3001 remote plasma source platforms and Summit specialized DC power system at the exposition, to be held July 11-13 at San Francisco’s Moscone Convention Center. In addition, this year marks AE’s 25th anniversary—the company now serves its global customers through 18 facilities in seven countries, including design and launch centers, a high-volume manufacturing center as well as worldwide sales and support offices.
Semiconductor Applications
The new line of Sekidenko OFTs and emissometers provides industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MO-CVD, UV cure and a variety of other semiconductor processes. The OR4000T provides multi-channel capability and supports read rates up to 2 KHz for the most demanding semiconductor applications. The OR4000E delivers high-speed performance along with real-time emissivity compensation. For processes that typically use thermocouple-based temperature measurement, the OR400T model provides a cost-effective, non-contact solution for semiconductor manufacturing.
The Aera EPV-100AW exhaust pressure controller is a patented technology that enables user selection of either “absolute” or differential control of a fab’s exhaust pressure. The EPV enables precise control of exhaust pressure and, thereby, of oxide film thickness—regardless of atmospheric pressure changes, such as weather conditions, house exhaust-pressure fluctuations or altitude. The tool’s superior durability, reliability and reduced power consumption enable improved yield and lower cost of ownership.
The Litmas RPS 1501 and 3001 family of fully integrated plasma sources and power-delivery systems delivers the widest range of ignition and operation conditions available. The Litmas RPS products are well suited for delivering high reactive gas specie fluxes for process applications such as wafer pre-clean, photoresist strip and ALD.
FPD Applications
The well-accepted Summit DC power supply has proven to be an enabling factor in the manufacture of large-area LCD television screens with TFT (thin-film transistor) technology. The Summit family enables higher yields, increased throughput for the most demanding Generation 7 and 8 FPD applications. The Summit power system delivers state-of-the-science arc management, as well as exceptional power repeatability and precision, to achieve the tight plasma process control necessary for consistently high yields.
Solar PV Applications
AE will also display several of its products for solar PV applications, including the Dressler® Cesar® RF generator, a full-featured power delivery system that meets the critical specifications of the solar-cell manufacturing industry.
To learn more about AE’s products during SEMICON West, visit the company in Booth #2202 in the South Hall at Moscone Convention Center in San Francisco. Editors interested in meeting with AE during the show may contact Angie Kellen by phone: 650.968.8900 x120, or email: akellen@mcapr.com.
About Advanced Energy
Advanced Energy® develops innovative power and control technologies that drive high-growth, plasma thin-film manufacturing processes worldwide, including semiconductors, flat panel displays, data storage products, solar cells, architectural glass, and other advanced product applications.
AE®’s product portfolio includes precise, flexible power systems; reliable gas and liquid flow-management systems; accurate thermal instruments; and global support services. Leveraging this focused product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity, and lower cost of ownership for its customers, including original equipment manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia, and Europe and offers global sales and support through direct offices, representatives, and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq Global Market under the symbol AEIS. For more information, go to www.advanced-energy.com.
Advanced Energy®, AE®, Aera®, Cesar®, Dressler® , Litmas™ and Summit® are trademarks of Advanced Energy Industries, Inc.
SEMICON® is a trademark of Semiconductor Equipment and Materials International (SEMI).