For more information, contact:

Doug Ryder Noah Precision 408.281.7772

Marna Shillman Advanced Energy Industries, Inc. 970.407.6280 marna.shillman@aei.com

Noah Precision to Showcase Point of Use Models 3300 and 3500 Temperature Control Systems for Wafer Etch Equipment at SEMICON West, July 10-13, 2000

SAN JOSE, CA - June 28, 2000 - Noah Precision, the world's leading manufacturer of independent temperature control systems for the semiconductor industry, will showcase two of its Point of Use Temperature Control modules July 10-13, 2000 at SEMICON West in San Francisco, CA. The Model 3300 and the Model 3500, a pair of environmentally safe products used for controlling wafer temperature during etch, will be the focus of Noah Precision's efforts in Booth #125.

 

The Model 3300 and Model 3500 improve process control by incorporating solid-state, thermoelectric technology, thereby eliminating compressors, which use ozone-depleting chemicals and toxic Freon substitutes. Both tools eliminate the concerns associated with routine upkeep of compressor-based systems.

"Both the Model 3300 and Model 3500 require neither maintenance nor spare parts to ensure continuous operation," said Bob Higgins, vice president of Noah Precision. "The small footprint, energy efficiency and only one moving part results in high mean time between failure and low cost-of-ownership. With our products, you're talking about the difference between a vending machine and a bread box in terms of footprint."

Noah's dynamic temperature control systems support submicron geometry and feature dynamic cooling for maintaining temperature setpoint in real time, while optimizing each process step with tailored temperature setpoints. Dynamic temperature control also enables process flexibility, increases yield through temperature stability and eliminates temperature-induced CD variability.

The Model 3300 is designed for standard wafer etch and measures 11.8 x 4.4 x 21.9 inches. It supports a temperature range from -20ºC to 90ºC with a cooling capacity of 1200 watts at 20ºC. The Model 3500 is designed for low temperature wafer etch. It measures 11.8 x 7.7 x 21.5 inches. The Model 3500 offers the same temperature range as the 3300, but has a cooling capacity of 2500 watts at 20ºC.

For more information on Noah products and services, please visit Booth #125 in the Moscone Convention Center.

About Noah Precision
Noah Precision, an Advanced Energy Company, is the world's leading manufacturer of solid-state, Peltier-based temperature control systems for the semiconductor industry. Noah designs, manufactures, and markets dynamic temperature control products, which are incorporated into wafer process equipment. They are used to prevent temperature drift in semiconductor manufacturing processes including plasma etch, wet etch, and photolithography. Noah's products incorporate leading edge technology, making them energy efficient, environmentally friendly, compact, and highly reliable.

Advanced Energy
(www.advanced-energy.com) acquired Noah Precision (www.noahprecision.com) in April 2000. Founded in 1981, Advanced Energy is a publicly held company traded on the NASDAQ under the symbol AEIS.