For more information, contact:

Jim Donaldson Advanced Energy Industries, Inc. 970.407.6374

Marna Shillman Advanced Energy Industries, Inc. 970.407.6280 marna.shillman@aei.com

Advanced Energy Introduces a New Family of Advanced Power Delivery Solutions

Fort Collins, Colorado (June 2, 2000)-Advanced Energy Industries, Inc. (Nasdaq: AEIS) has introduced the RFSuite(tm) family of advanced power delivery solutions. This unique family of integrated technologies provides power delivery, control and monitoring, as well as process enhancement and diagnostics for etch, PVD, and CVD semiconductor applications. The RFSuite family integrates the sophisticated 13.56 MHz Apex(tm) generator, Navigator(tm) digital match network, Z-Scan(tm) in-situ sensor, and PowerView(tm) control and monitoring software into a highly functional and versatile power delivery solution. This configuration goes beyond traditional RF power delivery systems, which are usually comprised of a generator and match only. The RFSuite family is the most innovative integration of technology available to ignite, maintain, diagnose, and control a plasma process.

 

The RFSuite family provides a number of critical benefits to the semiconductor manufacturing process including, clean, stable, repeatable process power; real-time predictive film stress; end-point detection; real-time etch rate; improved etch consistency; improved uniformity and film adhesion; tool-to-tool matching; and substantial savings on consumables, such as NF3 and other costly process gases.

Copies of the RFSuite brochure are available at no charge via e-mail to sales.support@aei.com or from the web at www.advanced-energy.com.

Advanced Energy is a global leader in the development, marketing, and support of technology solutions that are critical in the manufacture of semiconductors, data storage products, and flat panel displays as well as in applications that involve surface modification and process power control. Original equipment manufacturers (OEMs) and end-users around the world depend on AE products when plasma-based technology plays a central role in their manufacturing process. AE offers a comprehensive line of technology solutions including power conversion and control systems, process monitoring and control tools, ion-beam sources, dynamic temperature control products, and plasma abatement systems. AE technology solutions are sold and supported globally by direct offices, representatives, and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq under the symbol.