MDX 系列 500 W

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MDX 系列500 W

MDX 500 在真空环境中经久耐用，能够在磁控环境中对不同类型的弧进行多级抑制和灭弧。在基本磁控溅射、射频偏压直流溅射以及直流偏压射频溅射中表现一流。其小巧的尺寸使其非常适合于实验室系统和小规模的生产环境。

优势	特点
超载内置保护可靠性和耐用性快速反应时间兼容性认证	多级弧抑制及灭弧用户I/O接入功率、电流或电压调节功能

可下载文献

MDX Series 500 W Magnetron Drive brochure
Signal Integrity for Vacuum Processing Systems (2003) white paper
Advances in Arc-Handling in Reactive and Other Difficult Processes (2001) white paper
How Advanced Energy's MDX Products Manage Arcs (2001) white paper
Introducing Power Supplies and Plasma Systems (2001) white paper
Fabs can ride through voltage sags with power-quality targets, July 2004 magazine reprint
Power Supplies Advance Beyond Volts and Amps, June 2003 magazine reprint
Single-Magnetron Approach Reactive Sputtering of Dielectrics, September 2000 magazine reprint
AE Global Services brochure

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