For more information, contact:

Jim Donaldson Advanced Energy Industries, Inc. 970.407.6374

Marna Shillman Advanced Energy Industries, Inc. 970.407.6280 marna.shillman@aei.com

Advanced Energy Integrates PSI’s HYT Vacuum Particle Sensors into its Symphony Data Management System

FORT COLLINS, Colo., July 16, 2002—AE has successfully integrated Pacific Scientific Instruments’ (PSI) HYT PM-450 sensor bus controller (used with the comprehensive line of HYT vacuum particle sensors) into AE’s Symphony EPM (Equipment Productivity Manager) system. AE’s EPM provides connectivity, data collection, data storage, and analysis software to enable customers to improve overall equipment productivity.

 

The integration of PSI’s field-proven, in-situ HYT sensors was facilitated by both the open architecture of the Symphony technology and by the use of HYT industry-standard PM-450 Ethernet connectivity. Doug Schatz, Advanced Energy’s chairman and chief executive officer, noted, “Our successful integration of the HYT sensor bolsters our strong belief that open architecture and industry standards for connectivity are key to building value-added e-Diagnostics and process control technology for our customers.”

To-date, AE has successfully integrated three, unique sensors into the Symphony EPM: the HYT vacuum particle sensor, a Peak Sensor Systems optical emission spectrometer (OES) , and AE’s Z-Scanâ RF sensor. Joe Monkowski, Advanced Energy’s senior vice president, said, “Because our Symphony products can easily accommodate sensors from any source, we can provide critical sensor and tool data management for real-time process control and e-Diagnostics. The inherent time resolution of in-situ sensors combined with tool context information provides critical insight into the process, thereby reducing our customers’ time-to-yield, and enabling them to meet their customers’ increasing time-to-market demands.”

About Advanced Energy
Advanced Energy is a global leader in the development, marketing and support of components and sub-systems critical to plasma-based manufacturing processes used in the production of semiconductors, flat panel displays, data storage products, compact discs, digital video discs, architectural glass, and other applications that require precise thin-film processes.

AE offers a comprehensive line of technology solutions in power, flow and thermal management, plasma and ion beam sources, and integrated process monitoring and control to original equipment manufacturers (OEMs) and end-users around the world.

AE operates in regional centers in North America, Asia and Europe, and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. For more information, please visit our corporate website: www.advanced-energy.com

About Pacific Scientific Instruments
Pacific Scientific Instruments is an ISO 9001 company that designs, manufactures, and markets the Met One, HIAC, HYT and Royco brands of optical particle monitoring instrumentation. These products are used to detect and measure particulate contamination in liquid, air and vacuum applications in the life sciences, industrial and electronics industries. For more information, please visit: www.particle.com