For more information, contact:

Visit AE at SEMICON^® Europa Booth #2224, Hall 3

ADVANCED ENERGY^® TO HIGHLIGHT NEW PARAMOUNT™
RF POWER-DELIVERY SYSTEM AT SEMICON^® EUROPA 2007

AE^® also showcasing comprehensive suite of advanced process-power systems and proven flow management systems for photovoltaic (PV) manufacturing

Filderstadt, Germany, Oct. 2, 2007—Advanced Energy^® Industries, Inc. (NasdaqGM: AEIS) will highlight the new Paramount™ RF power-delivery system during SEMICON^® Europa 2007. AE® will also feature its extensive portfolio of advanced process-power systems and proven Aera^® flow-managements systems for photovoltaic (PV) manufacturing equipment at the exposition, to be held 9-11 October at the Stuttgart Trade Fair Centre.

Solar PV Applications
AE will underscore its strong PV application experience with a Photovoltaic Technology Arena presentation entitled, “Advanced Power Delivery Systems.” The presentation is scheduled Tuesday, 9 October 2007 at 15:45 hours at the SEMI Technology Arena in Hall 3. Highlighted among AE’s products for solar PV applications will be the Cesar® RF generator, a full-featured generator that meets the critical specifications of the solar-cell manufacturing industry.

Semiconductor Applications
AE’s new Paramount RF power system enables faster transitions, shorter steps and reduced process times to achieve unprecedented control, accuracy and repeatability in ever more complex applications. Precise power delivery and optional RF pulsing allow more accurate process control and uniformity when etching and depositing anti-reflective coatings, hard masks, cap layers and etch-stop layers required by the next-generation nodes. The Paramount system’s measurement technology and optional ultra-fast frequency tuning enable it to deliver exceptionally precise power at 13.56 MHz fixed or variable frequencies.

Also showcased will be the Aera EPV-100AW exhaust pressure controller. It has a patented technology that enables user selection of either “absolute” or differential control of a fab’s exhaust pressure. The EPV controller enables precise control of exhaust pressure and, thereby, of oxide film thickness—regardless of atmospheric pressure changes, such as weather conditions, house exhaust-pressure fluctuations or altitude. The EPV controller’s superior durability, reliability and reduced power consumption enable improved yield and lower cost of ownership.


To learn more about AE’s products during SEMICON Europa, visit http://www.advanced-energy.de/de/sce07.html and the company in booth #2224, Hall 3. Editors interested in meeting with AE during the show may contact Angie Kellen at akellen@mcapr.com.


About Advanced Energy
Advanced Energy is a global leader in innovative power and control technologies for high-growth, thin-film manufacturing and solar power generation. Specifically, AE targets semiconductors, solar cells, flat panel displays, data storage products, architectural glass, solar grid-tie inverters and other advanced applications.

AE’s product portfolio includes precise, flexible power systems; reliable gas and liquid flow-management systems; accurate thermal instruments; and global support services. Leveraging this focused product portfolio and technology leadership, AE creates solutions aimed at maximizing process impact, improving productivity and lowering cost of ownership for its customers, including original equipment manufacturers (OEMs) and end-users around the world.

AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq Global Market under the symbol AEIS. For more information, go to www.advanced-energy.com.

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Advanced Energy^®, AE^®, Aera^®, Cesar^® and Paramount™ are trademarks of Advanced Energy Industries, Inc.
SEMICON^® is a registered trademark of Semiconductor Equipment and Materials International (SEMI).