For more information, contact:

Tom Grove Advanced Energy Industries, Inc. (970) 224-6313

Literature Describes Revolutionary Technology for DC Magnetron Power Supplies

FORT COLLINS, Colorado (May 31, 1996)—In 1983, Advanced Energy Industries, Inc. (AE) revolutionized the dc magnetron world by introducing MDX power supplies for dc sputter applications. MDX technology, using pulse width modulation (PWM), became the worldwide standard for power conversion and control systems for plasma-based thin film production equipment.

 

Now, AE brings the world another breakthrough technology for reactive, dc, and bias sputtering applications. Using patent-pending variable resonant multi-phase technology, AE's MDX Pinnacle™ power supplies have reached a new peak in dc magnetron technology. The Pinnacle™ series delivers the finest power supply performance in the industry:

• Lowest stored output energy, with no output filters and no output switches
• Fastest arc response and comprehensive arc management
• Fastest power ramp, for uninterrupted processing
• Widest impedance range, without changing taps or purchasing additional power
• CE and VDE compliance
• Unprecedented I/O flexibility

For a free copy of the brochure describing the revolutionary new Pinnacle™ series of power supplies (AE #5600043), contact AE at the address and phone number given above.

Founded in 1980, AE is a leading supplier of power conversion and control systems for plasma-based thin film production equipment. Our systems are critical to industrial processes that use gaseous plasmas to deposit or etch thin film layers on materials or substrates such as glass, silicon, and metals during the manufacture of semiconductors, data storage media, flat panel displays, and a host of other products.