Apex -射频电源与供电系统

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The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing.

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Apex^® 射频供电系统

通用 Apex^® 系列射频电源和供电系统采用复杂的射频转换技术，在适合于真空室安装的模块化设计中提供增大的产品和工艺可靠性。Apex 平台在针对半导体、平板显示器或数据存储制造以等离子为基础的薄膜工艺中表现优异。

优势	特点
更高的功率密度更好的工艺灵活性产量提高持有成本降低简化工艺工具整合灵活的通信	简化的设计真空室安装、框架安装、支架安装和鞋盒式 (shoebox) 选择宽带控制回路和可选的高重复率脉冲业界领先的弧管理符合监管要求

可下载文献

Apex^® 射频电源与功率输出系统 English

Signal Integrity for Vacuum Processing Systems (2003) white paper
Advanced Energy RF Calibration Process (2002) white paper
The Evolution of RF Power Delivery in Plasma Processing (2001) white paper
Forward and Reflected Powers. What Do They Mean? (2001) white paper
Introducing Power Supplies and Plasma Systems (2001) white paper
Arcing Problems Encountered During Sputter Deposition of Aluminum (2000) white paper
Stabilizing RF Generator and Plasma Interactions, April 2004 magazine reprint
Fabs can ride through voltage sags with power-quality targets, July 2004 magazine reprint
Power Supplies Advance Beyond Volts and Amps, June 2003 magazine reprint
March 26, 2008 - Advances in Radio Frequency Plasma Power Delivery Systems presentation
RF Power Fundamentals Course data sheet
AE Global Services brochure

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