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SAN FRANCISCO, Calif., July 9, 2013—Advanced Energy Industries, Inc. (NasdaqGM:AEIS) today announced that it has expanded its advanced pulsing RF systems to now offer complete and enabling plasma management in complex thin-film process environments. The Advanced Energy (AE) Paramount suite of RF power delivery systems provides synchronized, pulsed RF power to improve etch rate selectivity, substrate profile control and film uniformity in a wide operating window. The Navigator II digital matching network incorporates advanced tune-while-pulsing capability for highly stable plasma and controlled power delivery. The Paramount and Navigator II platforms are designed to be used together in an advanced pulsing RF system, offering exceptional plasma control for single- and multi-level pulsing in PECVD and high-aspect ratio etch applications.

Advanced Energy will showcase its Paramount product platform, which spans frequencies from 400 kHz to 60 MHz, and its Navigator II matching network this week at the SEMICON West exhibition in San Francisco. In tandem with the semiconductor show, the company will host technology seminars where it will detail its latest pulsed RF and remote plasma source products that semiconductor tool manufacturers will use for 2X/1X technology nodes.

Yuval Wasserman, president of AE Thin Films said, “SEMICON West provides a great opportunity for us to connect with our customers in an environment that is immersed in innovation. At our exhibit and our technical seminars, we look forward to sharing our latest technologies, discussing current and future thin-films processing challenges and continuing to promote innovation through partnership with our customers.”

In addition to its featured technologies, Advanced Energy will display its Sekidenko optical fiber thermometers (OFT) and its recently acquired Solvix line of DC and pulsed DC power supplies.

SEMICON West, co-located with Intersolar North America, will take place at the Moscone Convention Center in San Francisco, July 9 – 11. To learn more about AE's advanced pulsing and thin-film technologies, please visit the company in the South Hall A, booth 2613, and the company's event website at www.advanced-energy.com/en/scw2013.html. AE will also exhibit at Intersolar North America in the West Hall of the Moscone Convention Center, booth L-209.
 

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