Dr. Hans Betz, chief executive officer of Advanced Energy, commented “As critical dimensions continue to shrink to sub-32 nm, thin-film manufacturers are challenged with achieving precise control while meeting aggressive cost targets. These new products usher in a powerful new combination of technical performance and productivity.” He continued, “These introductions, coupled with the recent opening of Advanced Energy’s Korean-based manufacturing facility, highlight our ongoing commitment to the South Korean technology market.”

Earlier this year, the company established a new manufacturing line in Sungnam City, South Korea, designed exclusively to serve South Korean flat panel display manufacturers. Volume shipments at the new line started last June. A special video presentation of the company’s new manufacturing facility will be on display at the show, as well as on the company’s website at http://www.advanced-energy.co.kr.

SEMICON Korea 2011 Show Highlights
Advanced Energy experts will be available at AE’s booth (#2612, COEX Center) to discuss the company’s latest additions to its portfolio of thin film power conversion solutions:

The Paramount series of RF generators features a new digital control system, enabling a wide range of capabilities for short process steps and pulsed applications. At the core of the Paramount’s performance is an enhanced power and impedance measurement system that delivers the power accuracy and repeatability required for next-generation etch and deposition processes. The Paramount series includes the Paramount HF (13 MHz) for high frequency applications and the new Paramount MF (400 kHz) for mid-frequency applications.

The Navigator II matching network improves power-delivery accuracy and repeatability by introducing fully digital measurement and control across a wide range of frequencies and power requirements. True ‘tune-while-pulse’ performance is now achieved resulting in enhanced stability and tighter process control. The optional Z’Scan^® II RF sensor provides unprecedented real-time measurement and analysis of process power and impedance.

In addition to its new products, the company will feature its established, market-leading power-delivery systems, including:

• Ascent^® DC Power Supplies, featuring proprietary Arc Management System™ technology designed to deliver reliable, stable and repeatable power throughout the thin-film manufacturing process. The result is outstanding film quality, productivity, throughput and yield.


• XStream^® Remote Plasma Source with Matching Network, now available with a 3 year standard warranty. The production proven system offers manufacturers high efficiency, exceptional reliability and advanced controls for chamber cleans.


• Sekidenko^® Optical Fiber Thermometers featuring market-leading OFT technology that delivers high speed, multi-channel temperature and emissivity measurement and control across multiple processes and substrates.

About Advanced Energy

Advanced Energy (NASDAQ:AEIS) is a global leader in innovative power and control technologies for high-growth, thin-film manufacturing and solar-power generation applications. Advanced Energy is headquartered in Fort Collins, Colorado, with dedicated support and service locations around the world. For more information, go to www.advanced-energy.com.