2012年
Next-Generation Arc Management: Precision DC Power Solutions to Manage Arcs for new Materials in Thin-Film PVD Applications
Society of Vacuum Coaters Inc., May 2012
Advances in Power Supplies for High Arc Rate Applications
Society of Vacuum Coaters Inc., May 2012
The Pulsed-DC Advantage: Improve Film Quality and Reduce Downtime in Reactive Sputtering Applications
Society of Vacuum Coaters Inc., May 2012
2011年
The Effects of Process Power on Arc Rate and Nodule Formation during Sputtering of Aluminum-Doped Zinc Oxide
Society of Vacuum Coaters Inc., April 2011
Factors in Arc Parameter Selection on Large Scale Deposition Processes
Society of Vacuum Coaters Inc., April 2011
Advancements in PVD Power Delivery Management
Inter PV, February 2011
2010年
Electrically Stable
Solar PV Management, 2010
Inverter Cost Analysis: The Right Metrics For Improved Payback
Solar Industry, July 2010
Commercial Grid-Direct PV System
SolarPro, April/May 2010
Managing Arcs for Optimum Deposition Performance
Society of Vacuum Coaters Inc., April 2010
Multi-Megawatt Systems in North America
Photon International, February 2010
2009年
Voltage Control for Reactive Sputtering: Improving Typical Sputter Rate while Dramatically Reducing Input Power Requirements
Society of Vacuum Coaters Inc., April 2009
Transformerless Inverters Maximize Power, Reduce System Complexity
Photovoltaics World, July 2009
Transformerless Inverters Open Up Greater Freedom in PV Installations
Inter PV, July 2009
Detecting and Preventing Instabilities in Plasma Processes
Society of Vacuum Coaters Inc., May 2009
2008年
Issues and Solutions for Dealing With a Highly Capacitive Transmission Cable
Society of Vacuum Coaters Inc., April 2008
Arc Prevention in Magnetron Sputtering Processes
Society of Vacuum Coaters Inc., April 2008
Optimising performance by Integrating RF Power and Match Technologies
Euro Asia Semiconductor, December 2007/January 2008
2007年
Arc Reduction in Magnetron Sputtering of Metallic Materials
Vacuum & Coating Technology, October 2007
Target Utilization in Pulsed-DC Sputtering Processes
Society of Vacuum Coaters Inc., April 2007
Sputter Process Enhancement Through Pulsed-DC Power
Society of Vacuum Coaters Inc., April 2007
2006年
Managing Arcs in RF Powered Plasma Processes
Vacuum & Coating Technology, December 2006
The Impact of Power Supply Arc Response on Production Yield and Field Reliability
Society of Vacuum Coaters Inc., April 2006
2005年
Arc Handling Considerations for DC Sputtering Power Supplies
Society of Vacuum Coaters Inc., April 2005
2004年
Effective Closed-Loop Control for Reactive Sputtering Using Two Reactive Gases
Society of Vacuum Coaters Inc., April 2004
Stabilizing RF Generator and Plasma Interactions
Society of Vacuum Coaters, April 2004
2003年
Control of the Reactive Sputtering Process Using Two Reactive Gases
Society of Vacuum Coaters Inc., May 2003
Power System Requirements for Enhanced Mid-Frequency Process Stability
Society of Vacuum Coaters Inc., May 2003
Mid-Frequency Dual Magnetron Reactive Co-Sputtering for Deposition of Customized Index Optical Films
Society of Vacuum Coaters Inc., May 2003
2002年
Parameter Optimization in Pulsed DC Reactive Sputter Deposition of Aluminum Oxide
Society of Vacuum Coaters, Inc., April 2002
Reactively Sputtering High on the Transition Curve Using a Few Inexpensive Components
Society of Vacuum Coaters, Inc., April 2002
Substrate Response During Dual Bipolar Pulsed Magnetron Sputtering
Society of Vacuum Coaters, Inc., April 2002
A New Generation of Power Supplies for Large Area Dual Magnetron Sputtering
Vacuum & Coating Technology, April 2002
2001年
Reactive Sputtering Using a Dual-Anode Magnetron System
Society of Vacuum Coaters, Inc., April 2001
2000年
Single-Magnetron Approach Reactive Sputtering of Dielectrics
Vacuum & Coating Technology, September 2000
Pulsed-DC Reactive Sputtering of Dielectrics: Pulsing Parameter Effects
Society of Vacuum Coaters, Inc., April 2000