For more information, contact:

Tom Grove Advanced Energy Industries, Inc. (970) 224-6313

Advanced Energy Announces the VZX 2500 and 5000 W, 4 MHz Impedance Matching Networks

FORT COLLINS, Colorado (November 4, 1997)—AE’s new VZX network series gives you the latest in impedance-matching technology. Like all matching networks, each specific configuration of the VZX series: optimizes tuning over a specific impedance range; handles different combinations of voltage and current as well as high frequencies, such as 13.56 MHz and 27.12 MHz; and addresses specific plasma process tool applications.

 

The VZX 5000 provides 4 MHz impedance matching for 25 A, 5000 W applications; the VZX 2501 provides 4 MHz impedance matching for 15 A, 2500 W applications. Both VZXs convert these complex impedance loads into 50-W, resistive loads. You can interface these loads with AE HFG 2501 (use VZX 2501) and HFG 5000 (use VZX 5000) power supplies, or with non-AE equivalent power supplies. Plasma process tool applications for the VZXs include plasma etch and deposition, reactive ion etch, RF sputtering, RF bias, and other related plasma processes. They are designed to meet UL/CSA and is SEMI S2-compliant.

• RS-232 improves system flexibility and eliminates the need for a dedicated control module (VZX 5000 feature, VZX 2501 option)
• Fiber-optic limit detection improves overall system reliability (VZX 5000 only)
• Optional V-I probe permits end-point detection for customized control of your chamber and process
• Easy to integrate with AE as well as non-AE power supplies
• Air cooled

For a free copy of literature describing the new VZX Network series, contact AE at the address, phone number, or website given above.

Founded in 1981, AE is a leading supplier of power conversion and control systems for plasma-based thin film production equipment. Our systems are critical to industrial processes that use gaseous plasmas to deposit or etch thin film layers on materials or substrates such as glass, silicon, and metals during the manufacture of semiconductors, data storage media, flat panel displays, and a host of other products.